국내 기업, 최신 HBM FAB 대응用 400mm FOUP Cleaner(NFC400) 양산 시작

Process Application

· 400 mm FOUP Cleaning

· All FOUP applications

· NFC400(Normal)

System Performance

· Separate cleaning of FOUP Body and FOUP

· Spin RPM: Body 0~10 RPM, Cover 0~400 RPM

· 2(Body) x 2(Cover) Cleaning Chambers

· Nozzle: High pressure spray

· Hot DI Cleaning & Hot CDA Drying

· N₂ Purge & Close system

· UPEH: 14 FOUPs/hour

The Merits

· Small Footprint (the smallest area in the world)

· High throughput, N₂ Purge & Close system

Robot

· 6 Axis Robot

· Auto Tilting, High Power, Fast Speed